Advances in Industrial Control

Design, Modeling and Control of Nanopositioning Systems

Authors: Fleming, Andrew J., Leang, Kam K.

  • Enriches understanding of precision control theory
  • Explains the complete process of nanopositioning control including practical difficulties and their solution
  • Reinforces basic principles with experimental application in atomic force microscope
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eBook $119.00
price for USA (gross)
  • ISBN 978-3-319-06617-2
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  • Immediate eBook download after purchase
Hardcover $159.00
price for USA
  • ISBN 978-3-319-06616-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $159.00
price for USA
  • Customers within the U.S. and Canada please contact Customer Service at 1-800-777-4643, Latin America please contact us at +1-212-460-1500 (Weekdays 8:30am – 5:30pm ET) to place your order.
  • Due: October 21, 2016
  • ISBN 978-3-319-35438-5
  • Free shipping for individuals worldwide
Rent the ebook  
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About this book

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control.

Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging.

Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.

About the authors

The authors have twenty years combined experience in the design, fabrication and control of precision mechatronic systems. Dr. Fleming is a Senior Lecturer and Australian Research Fellow at the School of Electrical Engineering and Computer Science, The University of Newcastle, Australia. His research includes nanopositioning, sensors, atomic force microscopy and nanofabrication.
Dr. Leang, is an Associate Professor of Mechanical Engineering at the University of Nevada-Reno, Nevada. His research includes the modeling and control of piezo actuators for scanning probe microscopy, fabrication and control of electroactive polymers, and the design of microelectromechanical systems (MEMS) for nanotechnology.

Table of contents (14 chapters)

  • Introduction

    Fleming, Andrew J. (et al.)

    Pages 1-15

  • Piezoelectric Transducers

    Fleming, Andrew J. (et al.)

    Pages 17-41

  • Types of Nanopositioners

    Fleming, Andrew J. (et al.)

    Pages 43-55

  • Mechanical Design: Flexure-Based Nanopositioners

    Fleming, Andrew J. (et al.)

    Pages 57-102

  • Position Sensors

    Fleming, Andrew J. (et al.)

    Pages 103-153

Buy this book

eBook $119.00
price for USA (gross)
  • ISBN 978-3-319-06617-2
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $159.00
price for USA
  • ISBN 978-3-319-06616-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $159.00
price for USA
  • Customers within the U.S. and Canada please contact Customer Service at 1-800-777-4643, Latin America please contact us at +1-212-460-1500 (Weekdays 8:30am – 5:30pm ET) to place your order.
  • Due: October 21, 2016
  • ISBN 978-3-319-35438-5
  • Free shipping for individuals worldwide
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Design, Modeling and Control of Nanopositioning Systems
Authors
Series Title
Advances in Industrial Control
Copyright
2014
Publisher
Springer International Publishing
Copyright Holder
Springer International Publishing Switzerland
eBook ISBN
978-3-319-06617-2
DOI
10.1007/978-3-319-06617-2
Hardcover ISBN
978-3-319-06616-5
Softcover ISBN
978-3-319-35438-5
Series ISSN
1430-9491
Edition Number
1
Number of Pages
XVI, 411
Number of Illustrations and Tables
81 b/w illustrations, 180 illustrations in colour
Topics