Editors:
- Offers comprehensive coverage of novel nanostructures fabricated by focused ion beam
- Provides the keys to understanding the emerging area of FIB nanostructures
- Written by leading experts in each research area
- Describes a key enabling technology forming a bridge between materials science research and the development of energy-related and other electronic devices
Part of the book series: Lecture Notes in Nanoscale Science and Technology (LNNST, volume 20)
Buy it now
Buying options
Tax calculation will be finalised at checkout
Other ways to access
This is a preview of subscription content, log in via an institution to check for access.
Table of contents (19 chapters)
-
Front Matter
About this book
FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.
Keywords
- AFM Cantilever Calibration
- Agmicro-Nanostructures
- Deterministic Fabrication of Nanostructures FIB
- Epitaxial Ferroelectric Nanostructures
- FIB
- FIB Fabrication Semiconductor Nanostructures
- FIB Induced Deposition
- FIB Milling
- FIB-Fabricated AU
- Focused Ion Beam
- Gratings and Speckle Patterns FIB
- Ion Beam Ething
- Ion Beam Milling
- Mass-Separated FIB
- Nano-Needles FIB
- Nanofabrication
- Nanopatterning Thin Films FIB
- Nanopore Arrays
- Nanostructure
- Nanowire-based Devices
- Patterning Graphene Nanostructures
- Single Nanopores
Editors and Affiliations
-
State Key Laboratory of Electronic, University of Electronic Science and Technology, Chengdu, People's Republic of China
Zhiming M. Wang
Bibliographic Information
Book Title: FIB Nanostructures
Editors: Zhiming M. Wang
Series Title: Lecture Notes in Nanoscale Science and Technology
DOI: https://doi.org/10.1007/978-3-319-02874-3
Publisher: Springer Cham
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer International Publishing Switzerland 2013
Hardcover ISBN: 978-3-319-02873-6Published: 13 January 2014
Softcover ISBN: 978-3-319-37468-0Published: 27 August 2016
eBook ISBN: 978-3-319-02874-3Published: 04 January 2014
Series ISSN: 2195-2159
Series E-ISSN: 2195-2167
Edition Number: 1
Number of Pages: XIII, 530
Number of Illustrations: 175 b/w illustrations, 200 illustrations in colour
Topics: Nanotechnology, Semiconductors, Nanotechnology and Microengineering, Nanochemistry, Nanoscale Science and Technology, Optical and Electronic Materials