Integration of Functional Oxides with Semiconductors

Authors: Demkov, Alexander A., Posadas, Agham B.

  • Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices
  • Provides a brief introduction to the methods accessible to non-experts, before going into details interesting to the experts
  • Includes a detailed glossary explaining the specialized terminology and providing insight into the terminology and how it’s used
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  • ISBN 978-1-4614-9320-4
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Hardcover $129.00
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  • ISBN 978-1-4614-9319-8
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Softcover $129.00
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  • ISBN 978-1-4939-4169-8
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Rent the ebook  
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About this book

This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Table of contents (9 chapters)

  • Introduction

    Demkov, Alexander A. (et al.)

    Pages 1-24

  • Critical Issues in Oxide-Semiconductor Heteroepitaxy

    Demkov, Alexander A. (et al.)

    Pages 25-44

  • Predictive Engineering of Semiconductor-Oxide Interfaces

    Demkov, Alexander A. (et al.)

    Pages 45-61

  • Crystalline Functional Oxide Growth Methods

    Demkov, Alexander A. (et al.)

    Pages 63-87

  • Thin Oxide Film Characterization Methods

    Demkov, Alexander A. (et al.)

    Pages 89-114

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-1-4614-9320-4
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-1-4614-9319-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $129.00
price for USA
  • ISBN 978-1-4939-4169-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Integration of Functional Oxides with Semiconductors
Authors
Copyright
2014
Publisher
Springer-Verlag New York
Copyright Holder
The Author(s)
Distribution Rights
Distribution rights for India: Delhi Book Store, New Delhi, India
eBook ISBN
978-1-4614-9320-4
DOI
10.1007/978-1-4614-9320-4
Hardcover ISBN
978-1-4614-9319-8
Softcover ISBN
978-1-4939-4169-8
Edition Number
1
Number of Pages
X, 278
Number of Illustrations and Tables
33 b/w illustrations, 113 illustrations in colour
Topics