175 years of Springer publishing +++ Through June 30: 50% off Physics & Astronomy Books

Microsystems and Nanosystems

Piezoresistor Design and Applications

Authors: Doll, Joseph C., Pruitt, Beth L.

  • Provides comprehensive design guidance on piezoresistance
  • Includes an overview of applications requirements
  • Codifies the design of piezoresistors in MEMS
  • Case study approach includes the design of strain gauges and uniaxial piezoresistors,  displacement sensing cantilevers,  and pressure sensors
see more benefits

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-1-4614-8517-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-1-4614-8516-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $129.00
price for USA
  • ISBN 978-1-4939-5554-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
About this book

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.  Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The  text concludes with an up-to-date discussion of the need for integrated MEMS  design and opportunities to leverage new materials, processes and MEMS technology. 

Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Table of contents (7 chapters)

  • Introduction

    Doll, Joseph C. (et al.)

    Pages 1-20

  • Piezoresistance Fundamentals

    Doll, Joseph C. (et al.)

    Pages 21-49

  • Sensitivity, Noise and Resolution

    Doll, Joseph C. (et al.)

    Pages 51-83

  • Fabrication and Process Modeling

    Doll, Joseph C. (et al.)

    Pages 85-125

  • Temperature Effects

    Doll, Joseph C. (et al.)

    Pages 127-148

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-1-4614-8517-9
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-1-4614-8516-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $129.00
price for USA
  • ISBN 978-1-4939-5554-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
Loading...

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Piezoresistor Design and Applications
Authors
Series Title
Microsystems and Nanosystems
Copyright
2013
Publisher
Springer-Verlag New York
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4614-8517-9
DOI
10.1007/978-1-4614-8517-9
Hardcover ISBN
978-1-4614-8516-2
Softcover ISBN
978-1-4939-5554-1
Series ISSN
2198-0063
Edition Number
1
Number of Pages
XI, 245
Number of Illustrations and Tables
15 b/w illustrations, 86 illustrations in colour
Topics