Multiscale Robotics for Microsystems

Manufacturing Using High Yield Precision Assembly

Authors: Popa, D.O., Stephanou, H.E., Murthy, R., Das, A.N.

  • Presents a new framework for automation at the micro and nano scales that can be used to address present and future micro and nano-manufacturing challenges
  • Shows leading edge application results resulting from multi-scale, precision automation frameworks, including optical MEMS, microsensors, and microrobotic devices
  • Brings together concepts from robotics, precision engineering, micro manufacturing, and MEMS
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  • ISBN 978-1-4614-4651-4
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About this book

Advances in micro and nano technology have increased the demand for miniaturized sensors, actuators, and other non-electronic MEMS that require assembly and packaging. "Multiscale Robotics for Microsystems Manufacturing" presents a new framework in micro automation based on robotic, or robotic-assisted, assembly and packaging. This volume ties concepts in precision engineering, control engineering, and MEMS together in a unique manner. The material covered begins with an introduction to microsystems and applications including heterogeneous MEMS assembly and miniaturization. In order to provide a link between MEMS and robotics, a detailed discussion of precision robotics and micro assembly is presented. This material is followed by a discussion of an automated micro robotic cells for microsystems manufacturing and MEMS assembly, along with design specifications and system architectures.

Buy this book

eBook  
  • ISBN 978-1-4614-4651-4
  • Digitally watermarked, DRM-free
  • Included format:
  • ebooks can be used on all reading devices

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Bibliographic Information

Bibliographic Information
Book Title
Multiscale Robotics for Microsystems
Book Subtitle
Manufacturing Using High Yield Precision Assembly
Authors
Copyright
2016
Publisher
Springer-Verlag New York
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-1-4614-4651-4
Edition Number
1
Number of Pages
X, 500
Topics