Springer Series on Atomic, Optical, and Plasma Physics

Fundamental Aspects of Plasma Chemical Physics

Kinetics

Authors: Capitelli, M., Celiberto, R., Colonna, G., Esposito, F., Gorse, C., Hassouni, K., Laricchiuta, A., Longo, S.

  • Presents examples drawn from microelectronics, fusion, and aerospace
  • Provides detailed descriptions of the state-to-state kinetic approach for benchmark plasma systems, using worked examples
  • Assesses both fundamental concepts and open problems
  • The third of three volumes in a series about plasma chemistry
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eBook $99.00
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  • ISBN 978-1-4419-8185-1
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-1-4419-8184-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.

The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

About the authors

Mario Capitelli, University of Bari, mario.capitelli@ba.imip.cnr.it

Gianpiero Colonna, IMIP CNR

Fabrizio Esposito, IMIP CNR

Khaled Hassouni, Institut Galilee-Univeriste Paris

Annarita Laricchiuta, IMIP CNR

Savino Longo, University of Bari

Reviews

“The work will be a valuable resource for researchers using many applications involving nonequilibrium cold plasmas such as plasma beams, etching, cleaning, deposition, surface activation, and gas lasers. … Extensive references are provided, chapter-by-chapter, in addition to useful tables of reactions and processes with descriptions and references. … Summing Up: Recommended. Graduate students, researchers/faculty, and professionals/practitioners.” (T. Eastman, Choice, Vol. 53 (10), June, 2016)


Table of contents (12 chapters)

  • Electron-Molecule Collision Cross Sections and Rate Coefficients for Processes Involving Excited States

    Capitelli, Mario (et al.)

    Pages 1-30

  • Reactivity and Relaxation of Vibrationally/Rotationally Excited Molecules with Open Shell Atoms

    Capitelli, Mario (et al.)

    Pages 31-56

  • Formation of Vibrationally and Rotationally Excited Molecules During Atom Recombination at Surfaces

    Capitelli, Mario (et al.)

    Pages 57-78

  • Kinetic and Monte Carlo Approaches to Solve Boltzmann Equation for the Electron Energy Distribution Functions

    Capitelli, Mario (et al.)

    Pages 79-111

  • Superelastic Collisions and Electron Energy Distribution Function

    Capitelli, Mario (et al.)

    Pages 113-142

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-1-4419-8185-1
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $129.00
price for USA
  • ISBN 978-1-4419-8184-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Fundamental Aspects of Plasma Chemical Physics
Book Subtitle
Kinetics
Authors
Series Title
Springer Series on Atomic, Optical, and Plasma Physics
Series Volume
85
Copyright
2016
Publisher
Springer-Verlag New York
Copyright Holder
Springer New York
eBook ISBN
978-1-4419-8185-1
DOI
10.1007/978-1-4419-8185-1
Hardcover ISBN
978-1-4419-8184-4
Series ISSN
1615-5653
Edition Number
1
Number of Pages
XVI, 318
Topics