Microsystems

MEMS Linear and Nonlinear Statics and Dynamics

Authors: Younis, Mohammad I.

  • Includes examples of numerous MEMS devices and structures that require static or dynamic modeling
  • Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces and mechanical shock of microstructures
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eBook $159.00
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  • ISBN 978-1-4419-6020-7
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  • Immediate eBook download after purchase
Hardcover $209.00
price for USA
  • ISBN 978-1-4419-6019-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $209.00
price for USA
  • ISBN 978-1-4614-2912-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
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About this book

MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also:

  • Includes examples of numerous MEMS devices and structures that require static or dynamic modeling including accelerometers, gyroscopes, and Atomic Force Microscopes.
  • Offers real world problems related to the dynamics of MEMS such as  static and dynamic pull-in, buckling,  and failure due to capillary forces.
  • Presents in-depth treatment of the statics and dynamics of electrostatic MEMS including universal pull-in curves and natural frequencies of common microbeams, performance analysis of micromirrors and torsional actuators, nonlinear dynamics of MEMS resonators and associated phenomena, as well as design issues related to comb-drive actuators.
  • Features detailed discussions of the effect of mechanical shock on microstructures.

MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design, modeling, and characterization.

Table of contents (8 chapters)

  • MEMS, Their Features, and Modeling Challenges

    Younis, Mohammad I.

    Pages 1-12

  • Vibrations of Lumped-Parameter Systems

    Younis, Mohammad I.

    Pages 13-56

  • Sensing and Actuation Actuation in MEMS

    Younis, Mohammad I.

    Pages 57-96

  • Elements of Lumped-Parameter Modeling in MEMS

    Younis, Mohammad I.

    Pages 97-153

  • Introduction to Nonlinear Dynamics

    Younis, Mohammad I.

    Pages 155-249

Buy this book

eBook $159.00
price for USA (gross)
  • ISBN 978-1-4419-6020-7
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $209.00
price for USA
  • ISBN 978-1-4419-6019-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $209.00
price for USA
  • ISBN 978-1-4614-2912-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
MEMS Linear and Nonlinear Statics and Dynamics
Authors
Series Title
Microsystems
Series Volume
20
Copyright
2011
Publisher
Springer US
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-1-4419-6020-7
DOI
10.1007/978-1-4419-6020-7
Hardcover ISBN
978-1-4419-6019-1
Softcover ISBN
978-1-4614-2912-8
Series ISSN
1389-2134
Edition Number
1
Number of Pages
XVI, 456
Topics