Feedback Control of MEMS to Atoms

Editors: Gorman, Jason J., Shapiro, Benjamin (Eds.)

  • Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can
  • Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others
  • Organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems
  • Covers specific applications and the importance of controls in the use of MEMS Actuators, Untethered Microrobots, and Micro-Scale Inertial Sensors
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Hardcover $209.00
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  • ISBN 978-1-4899-8891-1
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About this book

Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.

Table of contents (11 chapters)

  • Introduction

    Gorman, Jason J. (et al.)

    Pages 1-6

  • Feedback Control of Particle Size Distribution in Nanoparticle Synthesis and Processing

    Li, Mingheng (et al.)

    Pages 7-44

  • In Situ Optical Sensing and State Estimation for Control of Surface Processing

    Xiong, Rentian (et al.)

    Pages 45-67

  • Automated Tip-Based 2-D Mechanical Assembly of Micro/Nanoparticles

    Onal, Cagdas D. (et al.)

    Pages 69-108

  • Atomic Force Microscopy: Principles and Systems Viewpoint Enabled Methods

    Salapaka, Srinivasa (et al.)

    Pages 109-139

Buy this book

eBook $159.00
price for USA (gross)
  • ISBN 978-1-4419-5832-7
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $209.00
price for USA
valid through November 5, 2017
  • ISBN 978-1-4419-5831-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $209.00
price for USA
valid through November 5, 2017
  • ISBN 978-1-4899-8891-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Rent the eBook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
Feedback Control of MEMS to Atoms
Editors
  • Jason J. Gorman
  • Benjamin Shapiro
Copyright
2012
Publisher
Springer US
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-1-4419-5832-7
DOI
10.1007/978-1-4419-5832-7
Hardcover ISBN
978-1-4419-5831-0
Softcover ISBN
978-1-4899-8891-1
Edition Number
1
Number of Pages
VIII, 384
Topics