Microsystems

Optimal Synthesis Methods for MEMS

Editors: Ananthasuresh, S.G.K. (Ed.)

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About this book

The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process ­ In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

Table of contents (10 chapters)

  • Introduction

    Ananthasuresh, G. K.

    Pages 1-12

  • Synthesis for Mechanical Behavior

    Saxena, Anupam (et al.)

    Pages 13-42

  • Synthesis of Electro-Statically Actuated MEMS

    Ye, Wenjing (et al.)

    Pages 43-77

  • Synthesis Methods for Electro-Thermal Actuation

    Ananthasuresh, G. K.

    Pages 79-119

  • Synthesis with Piezoelectric Actuation

    Silva, Emílio Carlos Nelli

    Pages 121-153

Buy this book

eBook $149.00
price for USA (gross)
valid through November 5, 2017
  • ISBN 978-1-4615-0487-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $249.00
price for USA
valid through November 5, 2017
  • ISBN 978-1-4020-7620-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $199.00
price for USA
valid through November 5, 2017
  • ISBN 978-1-4613-5101-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Optimal Synthesis Methods for MEMS
Editors
  • S.G.K. Ananthasuresh
Series Title
Microsystems
Series Volume
13
Copyright
2003
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4615-0487-0
DOI
10.1007/978-1-4615-0487-0
Hardcover ISBN
978-1-4020-7620-6
Softcover ISBN
978-1-4613-5101-6
Series ISSN
1389-2134
Edition Number
1
Number of Pages
XIII, 320
Number of Illustrations and Tables
187 b/w illustrations
Topics