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Table of contents (6 chapters)
Keywords
About this book
There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Bibliographic Information
Book Title: Micromachined Mirrors
Authors: Robert Conant
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-1-4757-3764-6
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2003
Hardcover ISBN: 978-1-4020-7312-0Published: 31 December 2002
Softcover ISBN: 978-1-4419-5325-4Published: 07 December 2010
eBook ISBN: 978-1-4757-3764-6Published: 17 April 2013
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: XVI, 139
Topics: Mechanical Engineering, Engineering Design