Microsystem Design

Authors: Senturia, Stephen D.

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About this Textbook

It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Table of contents (23 chapters)

Buy this book

eBook $99.00
price for USA (gross)
  • ISBN 978-0-306-47601-3
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $134.00
price for USA
  • ISBN 978-0-7923-7246-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $134.00
price for USA
  • ISBN 978-1-4757-7458-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Microsystem Design
Authors
Copyright
2001
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-0-306-47601-3
DOI
10.1007/b117574
Hardcover ISBN
978-0-7923-7246-2
Softcover ISBN
978-1-4757-7458-0
Edition Number
1
Number of Pages
XXVI, 689
Number of Illustrations and Tables
145 b/w illustrations
Topics