Tribology Issues and Opportunities in MEMS

Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Editors: Bhushan, Bharat (Ed.)

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About this book

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Table of contents (51 chapters)

  • MEMS R&D in Europe

    Hermans, L.

    Pages 1-16

  • Integrated MEMS in Conventional CMOS

    Fedder, Gary K.

    Pages 17-29

  • Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review

    Madou, Marc

    Pages 31-51

  • Microfabrication Technologies for High Performance Microactuators

    Michel, F. (et al.)

    Pages 53-72

  • Surface Characterization of Non-Lithographic Micromachining

    Friedrich, C. R. (et al.)

    Pages 73-84

Buy this book

eBook $349.00
price for USA (gross)
  • ISBN 978-94-011-5050-7
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $445.00
price for USA
  • ISBN 978-0-7923-5024-8
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $445.00
price for USA
  • ISBN 978-94-010-6121-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Tribology Issues and Opportunities in MEMS
Book Subtitle
Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997
Editors
  • Bharat Bhushan
Copyright
1998
Publisher
Springer Netherlands
Copyright Holder
Springer Science+Business Media Dordrecht
eBook ISBN
978-94-011-5050-7
DOI
10.1007/978-94-011-5050-7
Hardcover ISBN
978-0-7923-5024-8
Softcover ISBN
978-94-010-6121-6
Edition Number
1
Number of Pages
XIV, 655
Topics