MEMS Reference Shelf

MEMS Materials and Processes Handbook

Editors: Ghodssi, Reza, Lin, Pinyen (Eds.)

  • Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS. Discusses specific MEMS fabrication techniques that fall into three primary categories: Additive, Subtractive, Lithography/patterning, as well as wafer Bonding, Doping, Surface Treatment/preparation, and Characterization Techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication

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eBook $249.00
price for USA (gross)
  • ISBN 978-0-387-47318-5
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $319.00
price for USA
  • ISBN 978-0-387-47316-1
  • Free shipping for individuals worldwide
  • This title is currently reprinting. You can pre-order your copy now.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
About this book

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.

          

Reviews

From the reviews:

“In this handbook, editors Ghodssi (Univ. of Maryland, College Park) and Lin (Touch Micro-system Technology, Taiwan) have essentially organized the collective knowledge of decades of MEMS research from around the world into one book. … This volume is not designed as a textbook, but instead as a reference, and is extremely useful for MEMS inventors. Summing Up: Highly recommended. Graduate students, researchers/faculty, and professionals.” (N. M. Fahrenkopf, Choice, Vol. 49 (2), October, 2011)

Table of contents (14 chapters)

  • The MEMS Design Process

    Lamers, Tina L. (et al.)

    Pages 1-36

  • Additive Processes for Semiconductors and Dielectric Materials

    Zorman, Christian A. (et al.)

    Pages 37-136

  • Additive Processes for Metals

    Arnold, David P. (et al.)

    Pages 137-191

  • Additive Processes for Polymeric Materials

    Meng, Ellis (et al.)

    Pages 193-271

  • Additive Processes for Piezoelectric Materials: Piezoelectric MEMS

    Polcawich, Ronald G. (et al.)

    Pages 273-353

Buy this book

eBook $249.00
price for USA (gross)
  • ISBN 978-0-387-47318-5
  • Digitally watermarked, DRM-free
  • Included format: PDF, EPUB
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $319.00
price for USA
  • ISBN 978-0-387-47316-1
  • Free shipping for individuals worldwide
  • This title is currently reprinting. You can pre-order your copy now.
Rent the ebook  
  • Rental duration: 1 or 6 month
  • low-cost access
  • online reader with highlighting and note-making option
  • can be used across all devices
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Bibliographic Information

Bibliographic Information
Book Title
MEMS Materials and Processes Handbook
Editors
  • Reza Ghodssi
  • Pinyen Lin
Series Title
MEMS Reference Shelf
Series Volume
1
Copyright
2011
Publisher
Springer US
Copyright Holder
Springer Science+Business Media, LLC
eBook ISBN
978-0-387-47318-5
DOI
10.1007/978-0-387-47318-5
Hardcover ISBN
978-0-387-47316-1
Series ISSN
1936-4407
Edition Number
1
Number of Pages
XXXVI, 1188
Number of Illustrations and Tables
200 b/w illustrations
Topics