MEMS Reference Shelf

BioNanoFluidic MEMS

Editors: Hesketh, Peter J. (Ed.)

  • Comprehensively shows the interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
  • Covers BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  • Includes hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
  • Provides complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
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Buy this book

eBook $159.00
price for USA (gross)
  • ISBN 978-0-387-46283-7
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $209.00
price for USA
  • ISBN 978-0-387-46281-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $209.00
price for USA
  • ISBN 978-1-4419-4279-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:

  • BioNanoFluidic MEMS connection between the interdisciplinary nature of
    BioNanoFluidics and MEMS
     
  • BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

  • Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others

  • Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS

  • BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  • Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others

  • Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration

"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus

Table of contents (11 chapters)

  • Nanotechnology: Retrospect and Prospect

    Meindl, James D.

    Pages 1-9

  • Synthesis of Oxide Nanostructures

    Hu, Chenguo (et al.)

    Pages 11-36

  • Nanolithography

    Murali, Raghunath

    Pages 37-62

  • Nano/Microfabrication Methods for Sensors and NEMS/MEMS

    Hesketh, Peter J.

    Pages 63-130

  • Micro- and Nanomanufacturing via Molding

    Rowland, Harry D. (et al.)

    Pages 131-151

Buy this book

eBook $159.00
price for USA (gross)
  • ISBN 978-0-387-46283-7
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $209.00
price for USA
  • ISBN 978-0-387-46281-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $209.00
price for USA
  • ISBN 978-1-4419-4279-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
BioNanoFluidic MEMS
Editors
  • Peter J. Hesketh
Series Title
MEMS Reference Shelf
Copyright
2008
Publisher
Springer US
Copyright Holder
Springer-Verlag US
eBook ISBN
978-0-387-46283-7
DOI
10.1007/978-0-387-46283-7
Hardcover ISBN
978-0-387-46281-3
Softcover ISBN
978-1-4419-4279-1
Series ISSN
1936-4407
Edition Number
1
Number of Pages
X, 295
Number of Illustrations and Tables
100 b/w illustrations
Topics