Overview
- Provides a unique balance between theory and practical design issues
- Presents comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design
- Provides a solid background on mechanical and electrical design, fabrication, packaging, testing and characterization
Part of the book series: MEMS Reference Shelf (MEMSRS)
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Table of contents (9 chapters)
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Front Matter
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Fundamentals of Micromachined Vibratory Gyroscopes
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Front Matter
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Structural Approaches to Improve Robustness
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Front Matter
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Back Matter
Keywords
About this book
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Reviews
From the reviews:
“This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. … The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers.” (Benu Chatterjee, Materials World, March, 2011)Authors and Affiliations
Bibliographic Information
Book Title: MEMS Vibratory Gyroscopes
Book Subtitle: Structural Approaches to Improve Robustness
Authors: Cenk Acar, Andrei Shkel
Series Title: MEMS Reference Shelf
DOI: https://doi.org/10.1007/978-0-387-09536-3
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag US 2009
Hardcover ISBN: 978-0-387-09535-6Published: 23 October 2008
Softcover ISBN: 978-1-4419-3489-5Published: 09 November 2010
eBook ISBN: 978-0-387-09536-3Published: 16 December 2008
Series ISSN: 1936-4407
Series E-ISSN: 1936-4415
Edition Number: 1
Number of Pages: XII, 260
Number of Illustrations: 131 b/w illustrations
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Automotive Engineering, Mechanical Engineering