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MEMS Reference Shelf

MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness

Authors: Acar, Cenk, Shkel, Andrei

  • Provides a unique balance between theory and practical design issues
  • Presents comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design
  • Provides a solid background on mechanical and electrical design, fabrication, packaging, testing and characterization
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Buy this book

eBook $149.00
price for USA (gross)
  • ISBN 978-0-387-09536-3
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $199.00
price for USA
  • ISBN 978-0-387-09535-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $199.00
price for USA
  • ISBN 978-1-4419-3489-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

 

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.

In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find:

  • A unique balance between theory and practical design issues.
  • Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design.
  • Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization.

 

About The MEMs Reference Shelf:

"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIA

Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus

Reviews

From the reviews:

“This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. … The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers.” (Benu Chatterjee, Materials World, March, 2011)

Table of contents (9 chapters)

Buy this book

eBook $149.00
price for USA (gross)
  • ISBN 978-0-387-09536-3
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $199.00
price for USA
  • ISBN 978-0-387-09535-6
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $199.00
price for USA
  • ISBN 978-1-4419-3489-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
MEMS Vibratory Gyroscopes
Book Subtitle
Structural Approaches to Improve Robustness
Authors
Series Title
MEMS Reference Shelf
Copyright
2009
Publisher
Springer US
Copyright Holder
Springer-Verlag US
eBook ISBN
978-0-387-09536-3
DOI
10.1007/978-0-387-09536-3
Hardcover ISBN
978-0-387-09535-6
Softcover ISBN
978-1-4419-3489-5
Series ISSN
1936-4407
Edition Number
1
Number of Pages
XII, 260
Number of Illustrations and Tables
131 b/w illustrations
Topics