Introductory MEMS

Fabrication and Applications

Authors: Adams, Thomas M., Layton, Richard A.

  • One of the first texts written that is accessible to undergraduate technical majors regardless of specific discipline
  • Describes sensors, actuators, and microfluidics, and their relationship with MEMS
  • Includes laboratory exercises designed to facilitate student learning about the basic microfabrication processes
  • Provides review questions and problems at the end of each chapter to summarize learning objectives
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Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-0-387-09511-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-0-387-09510-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • ISBN 978-1-4899-8421-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this Textbook

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

 

Table of contents (13 chapters)

  • Introduction

    Adams, Thomas M. (et al.)

    Pages 3-16

  • The substrate and adding material to it

    Adams, Thomas M. (et al.)

    Pages 17-63

  • Creating and transferring patterns—Photolithography

    Adams, Thomas M. (et al.)

    Pages 65-94

  • Creating structures—Micromachining

    Adams, Thomas M. (et al.)

    Pages 95-130

  • Solid mechanics

    Adams, Thomas M. (et al.)

    Pages 131-153

Buy this book

eBook $69.99
price for USA (gross)
  • ISBN 978-0-387-09511-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $99.00
price for USA
  • ISBN 978-0-387-09510-3
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $99.00
price for USA
  • ISBN 978-1-4899-8421-0
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Introductory MEMS
Book Subtitle
Fabrication and Applications
Authors
Copyright
2010
Publisher
Springer US
Copyright Holder
Springer-Verlag US
eBook ISBN
978-0-387-09511-0
DOI
10.1007/978-0-387-09511-0
Hardcover ISBN
978-0-387-09510-3
Softcover ISBN
978-1-4899-8421-0
Edition Number
1
Number of Pages
XVI, 444
Topics