Nanostructure Science and Technology

Alternative Lithography

Unleashing the Potentials of Nanotechnology

Editors: Sotomayor Torres, Clivia Marfa (Ed.)

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About this book

Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com­ mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red­ brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.

Table of contents (17 chapters)

  • Alternative Lithography

    Sotomayor Torres, Clivia M.

    Pages 1-14

  • Nanoimprint Lithography

    Chou, Stephen Y.

    Pages 15-23

  • Viscoelastic Properties of Polymers

    Hoffmann, Thomas

    Pages 25-45

  • Nanorheology

    Schift, Helmut (et al.)

    Pages 47-76

  • Wafer Scale Nanoimprint Lithography

    Montelius, Lars (et al.)

    Pages 77-101

Buy this book

eBook n/a
  • ISBN 978-1-4419-9204-8
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
Hardcover n/a
  • ISBN 978-0-306-47858-1
  • Free shipping for individuals worldwide
Softcover n/a
  • ISBN 978-1-4613-4836-8
  • Free shipping for individuals worldwide
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Bibliographic Information

Bibliographic Information
Book Title
Alternative Lithography
Book Subtitle
Unleashing the Potentials of Nanotechnology
Editors
  • Clivia Marfa Sotomayor Torres
Series Title
Nanostructure Science and Technology
Copyright
2003
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4419-9204-8
DOI
10.1007/978-1-4419-9204-8
Hardcover ISBN
978-0-306-47858-1
Softcover ISBN
978-1-4613-4836-8
Series ISSN
1571-5744
Edition Number
1
Number of Pages
XXI, 333
Topics