Microdevices

Rapid Thermal Processing of Semiconductors

Authors: Borisenko, Victor, Hesketh, Peter J.

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eBook $239.00
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  • ISBN 978-1-4899-1804-8
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  • ISBN 978-1-4899-1806-2
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About this book

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Table of contents (7 chapters)

  • Transient Heating of Semiconductors by Radiation

    Borisenko, Victor E. (et al.)

    Pages 1-29

  • Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals

    Borisenko, Victor E. (et al.)

    Pages 31-91

  • Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon

    Borisenko, Victor E. (et al.)

    Pages 93-111

  • Component Evaporation, Defect Annealing, and Impurity Diffusion in the III–V Semiconductors

    Borisenko, Victor E. (et al.)

    Pages 113-148

  • Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures

    Borisenko, Victor E. (et al.)

    Pages 149-191

Buy this book

eBook $239.00
price for USA (gross)
  • ISBN 978-1-4899-1804-8
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $309.00
price for USA
  • ISBN 978-0-306-45054-9
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $309.00
price for USA
  • ISBN 978-1-4899-1806-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
Rapid Thermal Processing of Semiconductors
Authors
Series Title
Microdevices
Copyright
1997
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4899-1804-8
DOI
10.1007/978-1-4899-1804-8
Hardcover ISBN
978-0-306-45054-9
Softcover ISBN
978-1-4899-1806-2
Edition Number
1
Number of Pages
XXII, 358
Topics