Microdevices

Electron Beam Testing Technology

Editors: Thong, John T.L. (Ed.)

Buy this book

eBook $189.00
price for USA (gross)
  • ISBN 978-1-4899-1522-1
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $249.00
price for USA
  • ISBN 978-0-306-44360-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $249.00
price for USA
  • ISBN 978-1-4899-1524-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
About this book

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

Table of contents (12 chapters)

Buy this book

eBook $189.00
price for USA (gross)
  • ISBN 978-1-4899-1522-1
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $249.00
price for USA
  • ISBN 978-0-306-44360-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $249.00
price for USA
  • ISBN 978-1-4899-1524-5
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Loading...

Services for this Book

Recommended for you

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Electron Beam Testing Technology
Editors
  • John T.L. Thong
Series Title
Microdevices
Copyright
1993
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4899-1522-1
DOI
10.1007/978-1-4899-1522-1
Hardcover ISBN
978-0-306-44360-2
Softcover ISBN
978-1-4899-1524-5
Edition Number
1
Number of Pages
XVI, 462
Topics