Microdevices

The Physics of Micro/Nano-Fabrication

Authors: Brodie, Ivor, Muray, Julius J.

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eBook $249.00
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  • ISBN 978-1-4757-6775-9
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Hardcover $319.00
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  • ISBN 978-0-306-44146-2
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Softcover $319.00
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  • ISBN 978-1-4419-3221-1
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About this book

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Table of contents (7 chapters)

Buy this book

eBook $249.00
price for USA (gross)
  • ISBN 978-1-4757-6775-9
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $319.00
price for USA
  • ISBN 978-0-306-44146-2
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
Softcover $319.00
price for USA
  • ISBN 978-1-4419-3221-1
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.
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Bibliographic Information

Bibliographic Information
Book Title
The Physics of Micro/Nano-Fabrication
Authors
Series Title
Microdevices
Copyright
1992
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4757-6775-9
DOI
10.1007/978-1-4757-6775-9
Hardcover ISBN
978-0-306-44146-2
Softcover ISBN
978-1-4419-3221-1
Edition Number
1
Number of Pages
XX, 622
Topics