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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Academy of Sciences of the USSR, Moscow, USSR
Kamil A. Valiev
Bibliographic Information
Book Title: The Physics of Submicron Lithography
Authors: Kamil A. Valiev
Series Title: Microdevices
DOI: https://doi.org/10.1007/978-1-4615-3318-4
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Plenum Press, New York 1992
Hardcover ISBN: 978-0-306-43578-2Published: 31 March 1992
Softcover ISBN: 978-1-4613-6461-0Published: 27 September 2012
eBook ISBN: 978-1-4615-3318-4Published: 06 December 2012
Edition Number: 1
Number of Pages: XI, 493
Topics: Solid State Physics, Spectroscopy and Microscopy, Condensed Matter Physics, Crystallography and Scattering Methods, Electrical Engineering, Optical and Electronic Materials