Microdevices

Oriented Crystallization on Amorphous Substrates

Authors: Givargizov, E.I.

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About this book

Present-day scienceand technology have become increasingly based on studies and applications of thin films. This is especiallytrue of solid-state physics, semiconduc­ tor electronics, integrated optics, computer science, and the like. In these fields, it is necessary to use filmswith an ordered structure, especiallysingle-crystallinefilms, because physical phenomena and effects in such films are most reproducible. Also, active parts of semiconductor and other devices and circuits are created, as a rule, in single-crystal bodies. To date, single-crystallinefilms have been mainly epitaxial (or heteroepitaxial); i.e., they have been grown on a single-crystalline substrate, and principal trends, e.g., in the evolution of integrated circuits (lCs), have been based on continuing reduction in feature size and increase in the number of components per chip. However, as the size decreases into the submicrometer range, technological and physical limitations in integrated electronics become more and more severe. It is generally believed that a feature size of about 0.1um will have a crucial character. In other words, the present two-dimensional ICs are anticipated to reach their limit of minimization in the near future, and it is realized that further increase of packing density and/or functions might depend on three-dimensional integration. To solve the problem, techniques for preparation of single-crystalline films on arbitrary (including amorphous) substrates are essential.

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Buy this book

eBook $229.00 net
( price for USA )
  • ISBN 978-1-4899-2560-2
  • digitally watermarked, no DRM
  • included format: PDF
  • eBooks can be used on all Reading Devices
Hardcover $289.00 net
( price for USA )
  • ISBN 978-0-306-43122-7
  • free shipping for individuals worldwide
  • usually dispatched within 3 to 5 business days
Softcover $289.00 net
( price for USA )
  • ISBN 978-1-4899-2562-6
  • free shipping for individuals worldwide
  • usually dispatched within 3 to 5 business days

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Bibliographic Information

Bibliographic Information
Book Title
Oriented Crystallization on Amorphous Substrates
Series Title
Microdevices
Copyright
1991
Publisher
Springer US
Copyright Holder
Springer Science+Business Media New York
eBook ISBN
978-1-4899-2560-2
DOI
10.1007/978-1-4899-2560-2
Hardcover ISBN
978-0-306-43122-7
Softcover ISBN
978-1-4899-2562-6
Edition Number
1
Topics