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Table of contents (7 chapters)
Keywords
About this book
Authors and Affiliations
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Bibliographic Information
Book Title: Protonendotierung von Silizium
Book Subtitle: Untersuchung und Modellierung protoneninduzierter Dotierungsprofile in Silizium
Authors: Johannes G Laven
DOI: https://doi.org/10.1007/978-3-658-07390-9
Publisher: Springer Vieweg Wiesbaden
eBook Packages: Computer Science and Engineering (German Language)
Copyright Information: Springer Fachmedien Wiesbaden 2014
Softcover ISBN: 978-3-658-07389-3Published: 21 October 2014
eBook ISBN: 978-3-658-07390-9Published: 07 October 2014
Edition Number: 1
Number of Pages: XVII, 314
Number of Illustrations: 77 b/w illustrations
Topics: Electrical Engineering, Industrial and Production Engineering, Semiconductors