Book titles in this series

Silicon Carbide Microsystems for Harsh Environments

Authors:

• Muthu Wijesundara
• Robert Azevedo

• Copyright: 2011

Available Renditions

• Hard cover
• Soft cover
• eBook

MEMS Reliability

Authors:

• Allyson L. Hartzell
• Mark G. da Silva
• Herbert R. Shea

• Copyright: 2011

Available Renditions

• Hard cover
• Soft cover
• eBook

Radioisotope Thin-Film Powered Microsystems

Authors:

• Rajesh Duggirala
• Amit Lal
• Shankar Radhakrishnan

• Copyright: 2010

Available Renditions

• Hard cover
• Soft cover
• eBook

RF MEMS Switches and Integrated Switching Circuits

Authors:

• Ai-Qun Liu

• Copyright: 2010

Available Renditions

• Hard cover
• Soft cover
• eBook

Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

Editors:

• Jeffrey Lang

• Copyright: 2010

Available Renditions

• Hard cover
• Soft cover
• eBook

MEMS Materials and Processes Handbook

Editors:

• Reza Ghodssi
• Pinyen Lin

• Copyright: 2011

Available Renditions

• Hard cover
• eBook

BioNanoFluidic MEMS

Editors:

• Peter J. Hesketh

• Copyright: 2008

Available Renditions

• Hard cover
• Soft cover
• eBook

Microfluidic Technologies for Miniaturized Analysis Systems

Editors:

• Steffen Hardt
• Friedhelm Schönfeld

• Copyright: 2007

Available Renditions

• Hard cover
• Soft cover
• eBook

MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness

Authors:

• Cenk Acar
• Andrei Shkel

• Copyright: 2009

Available Renditions

• Hard cover
• Soft cover
• eBook

Photonic Microsystems

Micro and Nanotechnology Applied to Optical Devices and Systems

Authors:

• Olav Solgaard

• Copyright: 2009

Available Renditions

• Hard cover
• Soft cover
• eBook