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From reviews of the 3rd edition: ".. In the present edition, some of the most fascinating new developments in the field have been included. Among those are investigations with ultrashort laser pulses, the fabrication of nanoclusters and nanocrystalline films, the synthesis of metastable materials, structural and chemical modificiations of surfaces, etc. More attention is also given to fields of practical interest such as three-dimensional microfabrication, laser cleaning, polishing, and lithography. The book can be used by the experts in the field as a reference source and by the students and beginners in the field as a textbook." K.M. Salikhov, Applied Magnetic Resonance 2000/19/2