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Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

  • Book
  • © 2012

Overview

Authors:
  1. Janusz Bogdanowicz

    1. University of Leuven, Leuven, Belgium

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  • Selected as an outstanding contribution by K.U. Leuven
  • Reports significant advances in non-destructive testing of semiconductors
  • New approaches have potential for industrial application
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Theses (Springer Theses)

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Table of contents (8 chapters)

  1. Front Matter

    Pages i-xxiii
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  2. Introduction

    • Janusz Bogdanowicz
    Pages 1-20

  3. Theory of Perturbation of the Reflectance

    • Janusz Bogdanowicz
    Pages 21-37

  4. Theory of Perturbation of the Refractive Index

    • Janusz Bogdanowicz
    Pages 39-51

  5. Theory of Carrier and Heat Transport in Homogeneously Doped Silicon

    • Janusz Bogdanowicz
    Pages 53-99

  6. Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers

    • Janusz Bogdanowicz
    Pages 101-113

  7. Assessment of the Model

    • Janusz Bogdanowicz
    Pages 115-139

  8. Application of the Model to Carrier Profiling

    • Janusz Bogdanowicz
    Pages 141-171

  9. Conclusions and Recommendations

    • Janusz Bogdanowicz
    Pages 173-178

  10. Back Matter

    Pages 179-201
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Keywords

About this book

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Authors and Affiliations

  • University of Leuven, Leuven, Belgium

    Janusz Bogdanowicz

Bibliographic Information

  • Book Title: Photomodulated Optical Reflectance

  • Book Subtitle: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

  • Authors: Janusz Bogdanowicz

  • Series Title: Springer Theses

  • DOI: https://doi.org/10.1007/978-3-642-30108-7

  • Publisher: Springer Berlin, Heidelberg

  • eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)

  • Copyright Information: Springer-Verlag Berlin Heidelberg 2012

  • Hardcover ISBN: 978-3-642-30107-0Published: 28 June 2012

  • Softcover ISBN: 978-3-642-42686-5Published: 17 July 2014

  • eBook ISBN: 978-3-642-30108-7Published: 26 June 2012

  • Series ISSN: 2190-5053

  • Series E-ISSN: 2190-5061

  • Edition Number: 1

  • Number of Pages: XXIV, 204

  • Topics: Semiconductors, Applied and Technical Physics

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