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Physics - Condensed Matter Physics | Photomodulated Optical Reflectance - A Fundamental Study Aimed at Non-Destructive Carrier Profiling

Photomodulated Optical Reflectance

A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon

Series: Springer Theses

Bogdanowicz, Janusz

2012, XXIV, 204 p.

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  • Selected as an outstanding contribution by K.U. Leuven
  • Reports significant advances in non-destructive testing of semiconductors
  • New approaches have potential for industrial application
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Content Level » Research

Keywords » Dopant and Carrier Profiling - Electrooptical and Electrothermal Effects - Non-destructive Semiconductor Testing - Ultra-shallow Junction Characterization - carrier and Heat Transport in Highly Injected Semiconductors

Related subjects » Applied & Technical Physics - Condensed Matter Physics

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