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Physics - Condensed Matter Physics | GaP Heteroepitaxy on Si(100) - Benchmarking Surface Signals when Growing GaP on Si in CVD Ambients

GaP Heteroepitaxy on Si(100)

Benchmarking Surface Signals when Growing GaP on Si in CVD Ambients

Series: Springer Theses

Döscher, Henning

2013, XIV, 143 p. 80 illus., 33 illus. in color.

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  • Winner of a 2012 German Physical Society Dissertation Award
  • An important contribution to improving optoelectronic devices and performance of photovoltaic materials
  • Interesting for all experimentalists working on the integration of III-V semiconductors and silicon
Epitaxial integration of III-V semiconductors on silicon substrates has been desired over decades for high application potential in microelectronics, photovoltaics, and beyond. The performance of optoelectronic devices is still severely impaired by critical defect mechanisms driven by the crucial polar-on-nonpolar heterointerface. This thesis reports almost lattice-matched growth of thin gallium phosphide films as a viable model system for III-V/Si(100) interface investigations. The impact of antiphase disorder on the heteroepitaxial growth surface provides quantitative optical in situ access to one of the most notorious defect mechanisms, even in the vapor phase ambient common for compound semiconductor technology. Precise control over the surface structure of the Si(100) substrates prior to III-V nucleation prevents the formation of antiphase domains. The hydrogen-based process ambient enables the preparation of anomalous double-layer step structures on Si(100), highly beneficial for subsequent III-V integration.

Content Level » Research

Keywords » Anti-phase Disorder - III-V Semiconductor Heteroepitaxy on Silicon Substrates - In Situ Reflectance Anisotropy Spectroscopy - Lattice-matched Growth - Materials for Photovoltaics - Metal-organic Vapor Phase Epitaxy - Polar on Non-polar Interface

Related subjects » Condensed Matter Physics - Optical & Electronic Materials - Optics & Lasers

Table of contents 

Introduction.- Experimental.- Si(100) surfaces in chemical vapor environments.- GaP(100) and InP(100) surfaces.- GaP growth on Si(100) and anti-phase disorder.- Conclusion.

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