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Rapid Thermal Processing of Semiconductors

  • Book
  • © 1997

Overview

Authors:
  1. Victor E. Borisenko

    1. Belarussian State University of Informatics and Radioelectronics, Minsk, Republic of Belarus

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  2. Peter J. Hesketh

    1. The University of Illinois at Chicago, Chicago, USA

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Part of the book series: Microdevices (MDPF)

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Table of contents (7 chapters)

  1. Front Matter

    Pages i-xxii
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  2. Transient Heating of Semiconductors by Radiation

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 1-29

  3. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 31-91

  4. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 93-111

  5. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III–V Semiconductors

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 113-148

  6. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 149-191

  7. Rapid Thermal Oxidation and Nitridation

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 193-252

  8. Rapid Thermal Chemical Vapor Deposition

    • Victor E. Borisenko, Peter J. Hesketh
    Pages 253-300

  9. Back Matter

    Pages 301-358
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Keywords

About this book

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Authors and Affiliations

  • Belarussian State University of Informatics and Radioelectronics, Minsk, Republic of Belarus

    Victor E. Borisenko

  • The University of Illinois at Chicago, Chicago, USA

    Peter J. Hesketh

Bibliographic Information

  • Book Title: Rapid Thermal Processing of Semiconductors

  • Authors: Victor E. Borisenko, Peter J. Hesketh

  • Series Title: Microdevices

  • DOI: https://doi.org/10.1007/978-1-4899-1804-8

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 1997

  • Hardcover ISBN: 978-0-306-45054-9Published: 31 May 1997

  • Softcover ISBN: 978-1-4899-1806-2Published: 20 June 2013

  • eBook ISBN: 978-1-4899-1804-8Published: 22 November 2013

  • Edition Number: 1

  • Number of Pages: XXII, 358

  • Topics: Optical and Electronic Materials, Solid State Physics, Spectroscopy and Microscopy

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