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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Belarussian State University of Informatics and Radioelectronics, Minsk, Republic of Belarus
Victor E. Borisenko
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The University of Illinois at Chicago, Chicago, USA
Peter J. Hesketh
Bibliographic Information
Book Title: Rapid Thermal Processing of Semiconductors
Authors: Victor E. Borisenko, Peter J. Hesketh
Series Title: Microdevices
DOI: https://doi.org/10.1007/978-1-4899-1804-8
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1997
Hardcover ISBN: 978-0-306-45054-9Published: 31 May 1997
Softcover ISBN: 978-1-4899-1806-2Published: 20 June 2013
eBook ISBN: 978-1-4899-1804-8Published: 22 November 2013
Edition Number: 1
Number of Pages: XXII, 358
Topics: Optical and Electronic Materials, Solid State Physics, Spectroscopy and Microscopy