Alternative Lithography

1. Front Matter

   Pages i-xxi

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2. Alternative Lithography

   • Clivia M. Sotomayor Torres

   Pages 1-14

3. Nanoimprint Lithography

   • Stephen Y. Chou

   Pages 15-23

4. Viscoelastic Properties of Polymers

   • Thomas Hoffmann

   Pages 25-45

5. Nanorheology

   • Helmut Schift, Laura J. Heyderman

   Pages 47-76

6. Wafer Scale Nanoimprint Lithography

   • Lars Montelius, Babak Heidari

   Pages 77-101

7. Step and Stamp Imprint Lithography

   • Jouni Ahopelto, Tomi Haatainen

   Pages 103-115

8. Step and Flash Imprint Lithography

   • T. C. Bailey, M. Colburn, B. J. Choi, A. Grot, J. G. Ekerdt, S. V. Sreenivasan et al.

   Pages 117-137

9. Using PDMS as a thermocurable resist for a mold assisted imprint process

   • L. Malaquin, C. Vieu

   Pages 139-165

10. Molecules for Microcontact Printing

    • Juriaan Huskens, Maik Liebau, David N. Reinhoudt

    Pages 167-180

11. Microcontact Printing Techniques

    • Massimo Tormen

    Pages 181-212

12. Local Oxidation Nanolithography

    • Ricardo Garcia

    Pages 213-233

13. Combined Approaches for Nanoelectronic Device Fabrication

    • I. Martini, M. Kamp, A. Forchel

    Pages 235-248

14. Application of Nanoimprint Lithography in Magnetism

    • Y. Chen, M. Natali, S. P. Li, A. Lebib

    Pages 249-270

15. Application of Microcontact Printing and Nanoimprint Lithography

    • Georg Schmidt, Tatjana Borzenko, Massimo Tormen, Volkmar Hock, Laurens W. Molenkamp

    Pages 271-285

16. Optical Applications of Nanoimprint Lithography

    • J. Seekamp

    Pages 287-296

17. Biotechnology Applications of NIL

    • Lars Montelius, Babak Heidari

    Pages 297-303

18. Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis

    • Anne Pépin, Yong Chen

    Pages 305-330

19. Back Matter

    Pages 331-333

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Good old Gutenberg could not have imagined that his revolutionary printing concept which so greatly contributed to dissemination of knowledge and thus today 's wealth, would have been a source of inspiration five hundred years later. Now, it seems intuitive that a simple way to produce a large number of replicates is using a mold to emboss pattern you need, but at the nanoscale nothing is simple: the devil is in the detail. And this book is about the "devil". In the following 17 chapters, the authors-all of them well recognized and active actors in this emerging field-describe the state-of-the-art, today 's technological bottlenecks and the prospects for micro-contact printing and nanoimprint lithography. Many results of this book originate from projects funded by the European Com­ mission through its "Nanotechnology Information Devices" (NID) initiative. NID was launched with the objective to develop nanoscale devices for the time when the red­ brick scenario of the ITRS roadmap would be reached. It became soon clear however, that there was no point to investigate only alternative devices to CMOS, but what was really needed was an integrated approach that took into account more facets of this difficult undertaking. Technologically speaking , this meant to have a coherent strategy to develop novel devices, nanofabrication tools and circuit & system architectures at the same time.

• electronics
• liquid
• nanotechnology
• polymer
• polymers
• thin film

• University of Wuppertal, Wuppertal, Germany

  Clivia M. Sotomayor Torres

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