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Scanning Electron Microscopy and X-Ray Microanalysis

  • Realigns the text with the needs of a diverse audience from researchers and graduate students to SEM operators and technical managers
  • Emphasizes practical, hands-on operation of the microscope, particularly user selection of the critical operating parameters to achieve meaningful results
  • Provides step-by-step overviews of SEM, EDS, and EBSD and checklists of critical issues for SEM imaging, EDS x-ray microanalysis, and EBSD crystallographic measurements
  • Makes extensive use of open source software: NIH ImageJ-FIJI for image processing and NIST DTSA II for quantitative EDS x-ray microanalysis and EDS spectral simulation
  • Includes case studies to illustrate practical problem solving
  • Covers Helium ion scanning microscopy
  • Organized into relatively self-contained modules – no need to "read it all" to understand a topic

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Table of contents (31 chapters)

  1. Front Matter

    Pages I-XXIII
  2. Electron Beam—Specimen Interactions: Interaction Volume

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 1-14
  3. Backscattered Electrons

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 15-28
  4. Secondary Electrons

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 29-37
  5. X-Rays

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 39-63
  6. Scanning Electron Microscope (SEM) Instrumentation

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 65-91
  7. Image Formation

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 93-110
  8. SEM Image Interpretation

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 111-121
  9. The Visibility of Features in SEM Images

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 123-131
  10. Image Defects

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 133-146
  11. High Resolution Imaging

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 147-164
  12. Low Beam Energy SEM

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 165-172
  13. Variable Pressure Scanning Electron Microscopy (VPSEM)

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 173-185
  14. ImageJ and Fiji

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 187-193
  15. SEM Imaging Checklist

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 195-200
  16. SEM Case Studies

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 201-207
  17. Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 209-234
  18. DTSA-II EDS Software

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 235-264
  19. Qualitative Elemental Analysis by Energy Dispersive X-Ray Spectrometry

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 265-287
  20. Quantitative Analysis: From k-ratio to Composition

    • Joseph I. Goldstein, Dale E. Newbury, Joseph R. Michael, Nicholas W. M. Ritchie, John Henry J. Scott, David C. Joy
    Pages 289-307

About this book

This thoroughly revised and updated Fourth Edition of a time-honored text provides the reader with a comprehensive introduction to the field of scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS) for elemental microanalysis, electron backscatter diffraction analysis (EBSD) for micro-crystallography, and focused ion beams. Students and academic researchers will find the text to be an authoritative and scholarly resource, while SEM operators and a diversity of practitioners — engineers, technicians, physical and biological scientists, clinicians, and technical managers — will find that every chapter has been overhauled to meet the more practical needs of the technologist and working professional. In a break with the past, this Fourth Edition de-emphasizes the design and physical operating basis of the instrumentation, including the electron sources, lenses, detectors, etc. In the modern SEM, many of the low level instrument parameters are now controlled and optimized by the microscope’s software, and user access is restricted. Although the software control system provides efficient and reproducible microscopy and microanalysis, the user must understand the parameter space wherein choices are made to achieve effective and meaningful microscopy, microanalysis, and micro-crystallography. Therefore, special emphasis is placed on beam energy, beam current, electron detector characteristics and controls, and ancillary techniques such as energy dispersive x-ray spectrometry (EDS) and electron backscatter diffraction (EBSD).


With 13 years between the publication of the third and fourth editions, new coverage reflects the many improvements in the instrument and analysis techniques. The SEM has evolved into a powerful and versatile characterization platform in which morphology, elemental composition, and crystal structure can be evaluated simultaneously. Extension of the SEM into a "dual beam" platform incorporating bothelectron and ion columns allows precision modification of the specimen by focused ion beam milling. New coverage in the Fourth Edition includes the increasing use of field emission guns and SEM instruments with high resolution capabilities, variable pressure SEM operation, theory, and measurement of x-rays with high throughput silicon drift detector (SDD-EDS) x-ray spectrometers. In addition to powerful vendor- supplied software to support data collection and processing, the microscopist can access advanced capabilities available in free, open source software platforms, including the National Institutes of Health (NIH) ImageJ-Fiji for image processing and the National Institute of Standards and Technology (NIST) DTSA II for quantitative EDS x-ray microanalysis and spectral simulation, both of which are extensively used in this work. However, the user has a responsibility to bring intellect, curiosity, and a proper skepticism to information on a computer screen and to the entire measurement process. This book helps you to achieve this goal.
  • Realigns the text with the needs of a diverse audience from researchers and graduate students to SEM operators and technical managers
  • Emphasizes practical, hands-on operation of the microscope, particularly user selection of the critical operating parameters to achieve meaningful results
  • Provides step-by-step overviews of SEM, EDS, and EBSD and checklists of critical issues for SEM imaging, EDS x-ray microanalysis, and EBSD crystallographic measurements
  • Makes extensive use of open source software: NIH ImageJ-FIJI for image processing and NIST DTSA II for quantitative EDS x-ray microanalysis and EDS spectral simulation.
  • Includes case studies to illustrate practical problem solving
  • Covers Helium ion scanning microscopy
  • Organized into relatively self-contained modules – no need to "read it all" to understand a topic
  • Includesan online supplement—an extensive "Database of Electron–Solid Interactions"—which can be accessed on SpringerLink, in Chapter 3

Reviews

Form the reviews of the third edition:

“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)

“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)


Authors and Affiliations

  • University of Massachusetts, Amherst, USA

    Joseph I. Goldstein

  • National Institute of Standards and Technology, Gaithersburg, USA

    Dale E. Newbury, Nicholas W.M. Ritchie, John Henry J. Scott

  • Sandia National Laboratories, Albuquerque, USA

    Joseph R. Michael

  • University of Tennessee, Knoxville, USA

    David C. Joy

About the authors

This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.

Bibliographic Information

Buy it now

Buying options

eBook USD 84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 119.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access