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Advanced Technologies Based on Wave and Beam Generated Plasmas

  • Book
  • © 1999

Overview

Editors:
  1. H. Schlüter

    1. Institute of Experimental Physics II, Ruhr-University Bochum, Bochum, Germany

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  2. A. Shivarova

    1. Faculty of Physics, Sofia University, Sofia, Bulgary

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Part of the book series: NATO Science Partnership Subseries: 3 (ASHT, volume 67)

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Table of contents (62 chapters)

  1. Front Matter

    Pages i-xiii
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  2. Lectures

    1. Gas Discharges: Applications

      1. Plasma Discharges for Materials Processing and Display Applications
        • Michael A. Lieberman
        Pages 1-22
      2. The Development and Use of Surface-Wave Sustained Discharges for Applications
        • M. Moisan, J. Hubert, J. Margot, Z. Zakrzewski
        Pages 23-64
      3. Electrodeless Gas Discharges for Lighting
        • G. G. Lister
        Pages 65-96
      4. Plasma Production above Multipolar Magnetic Field Structures: From D.C. Magnetrons to Distributed ECR
        • J. Pelletier, T. Lagarde, Y. Arnal
        Pages 97-110
      5. ECR Plasmas for Thin-Film Deposition
        • R. Wilhelm
        Pages 111-122
      6. Deposition Properties and Applications of Carbon-Based Coatings
        • R. Wilhelm
        Pages 123-135
      7. Substrate Biasing during Plasma Processing: Interest, Methods and Limitations
        • J. Pelletier
        Pages 137-148
      8. Ion Energy Distributions
        • G. M. W. Kroesen, M. van de Grift, R. J. M. M. Snijkers, F. J. de Hoog
        Pages 149-173
      9. Dusty Plasmas: Fundamental Aspects and Industrial Applications
        • G. M. W. Kroesen, E. Stoffels, W. W. Stoffels, G. H. P. M. Swinkels, A. Bouchoule, Ch. Hollenstein et al.
        Pages 175-190

    2. Ion Implantation

      1. Plasma Based Ion Implantation
        • Wolfhard Möller
        Pages 191-244

    3. Wave Generated Plasmas

      1. Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments
        • D. Grozev, K. Kirov, I. Koleva, K. Makasheva, A. Shivarova
        Pages 245-270
      2. Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges
        • H. Schlüter
        Pages 271-310
      3. Travelling Wave Discharges in Nitrogen: Modelling and Experiment
        • C. M. Ferreira, F. M. Dias, E. Tatarova
        Pages 311-334
      4. Atmospheric Pressure Discharges: Traveling Wave Plasma Sources
        • Z. Zakrzewski, M. Moisan
        Pages 335-342
      5. Modeling of Atmospheric Pressure Microwave Sustained Discharges
        • Z. Zakrzewski, J. Stańco, M. Moisan
        Pages 343-352
      6. Long Microwave Discharges
        • Z. Zakrzewski, M. Moisan
        Pages 353-365
      7. Waves in Bounded Magnetized Plasmas
        • S. T. Ivanov
        Pages 367-390

    4. Beam Generated Plasmas

      1. Electron Beam Generated Plasmas: Theory, Experiments, Applications
        • M. V. Kuzelev, G. P. Mkheidze, A. A. Rukhadze, P. S. Strelkov, A. G. Shkvarunets
        Pages 391-428
      2. EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atoms
        • G. Fussmann, C. Biedermann, R. Radtke
        Pages 429-468
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Keywords

About this book

This volume is based on the lectures at the NATO Advanced Study Institute, entitled "Advanced Technologies Based on Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from May 22 till June 1, 1998. It attracted almost 100 participants from 16 different countries. The meeting combined different types of scientists from advanced experts to aspiring young researchers. It aimed at stimulating future development by providing-across borders- cross-fertilization and exchanges between previously unconnected groups. This is reflected in the contents of the volume which covers the lectures given. The book also contains in a second part 43 poster presentations mostly from younger participants with valuable complementations and specifica­ tions to the lectures. With its topics the Advanced Study Institute constitutes the first attempt to bring together in an organized manner three areas of work on plasma technologies: advanced efforts based on wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

Editors and Affiliations

  • Institute of Experimental Physics II, Ruhr-University Bochum, Bochum, Germany

    H. Schlüter

  • Faculty of Physics, Sofia University, Sofia, Bulgary

    A. Shivarova

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