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  • Book
  • © 1991

Si Silicon

Silicon Nitride in Microelectronics and Solar Cells

Authors:

Editors:

  1. Eberhard F. Krimmel

    1. Universität Frankfurt/Main, Germany

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  2. Rudolf Hezel

    1. Universität Erlangen, Nürnberg, Germany

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  3. Uwe Nohl

    1. Gmelin Institute, Frankfurt/Main, Germany

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  4. Rainer Bohrer

    1. Gmelin Institute, Frankfurt/Main, Germany

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  1. Alfred Pebler

    1. Gmelin Institute, Frankfurt/Main, Germany

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  2. Friedrich Schröder

    1. Gmelin Institute, Frankfurt/Main, Germany

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Part of the book series: Gmelin Handbook of Inorganic and Organometallic Chemistry - 8th edition (GMELIN, volume S-i / B / 1-5 / 5 / c)

Part of the book sub series: Si. Silicium. Silicon (System-Nr. 15) (2074)

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Table of contents (32 chapters)

  1. Front Matter

    Pages N2-XV
    PDF

  2. Introductory Remarks

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 1-2

  3. Preparation and Patterning of Silicon Nitride Layers and Films

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 3-33

  4. Silicon Nitride Application as Masks

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 34-71

  5. Insulating Silicon Nitride Films

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 72-76

  6. Silicon Nitride for Gettering

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 77-79

  7. Silicon Nitride for Protecting and Passivating Devices. Improving the Radiation Resistance

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 80-98

  8. Silicon Nitride in Encapsulation and Recrystallization

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 99-118

  9. Silicon Nitride Applied for the Manufacture of Contacts and Interconnections

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 119-138

  10. Silicon Nitride for Isolating Devices and Device Components

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 139-152

  11. Silicon Nitride in Resistor Fabrication

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 153-154

  12. Silicon Nitride Dielectrics and Masks in Capacitors

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 155-160

  13. Silicon Nitride as Mask and Dielectric in Field Effect Devices

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 161-188

  14. Silicon Nitride Substrates, Masks and Dielectrics in Thin-Film Devices on Insulators

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 189-200

  15. Charge-Coupled Devices (CCDs)

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 201-203

  16. Schottky Diodes

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 204-205

  17. Silicon Nitride in Bipolar Devices (Diodes, Transistors and Thyristors)

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 206-220

  18. Silicon Nitride in Integrated Circuit (IC) Technology

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 221-232

  19. Silicon Nitride in Field Effect Transistor-Based Integrated Circuits (FET ICs)

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 233-238

  20. Silicon Nitride in Bipolar Device-Based Integrated Circuits

    • Eberhard F. Krimmel, Rudolf Hezel, Uwe Nohl, Rainer Bohrer
    Pages 239-242
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About this book

This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec­ tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non­ specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci­ fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1.
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Keywords

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Authors, Editors and Affiliations

  • Gmelin Institute, Frankfurt/Main, Germany

    Alfred Pebler, Friedrich Schröder, Uwe Nohl, Rainer Bohrer

  • Universität Frankfurt/Main, Germany

    Eberhard F. Krimmel

  • Universität Erlangen, Nürnberg, Germany

    Rudolf Hezel

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Bibliographic Information

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eBook USD 1,459.00
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  • Available as PDF
  • Read on any device
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  • Own it forever

Tax calculation will be finalised at checkout

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