Authors:
- This book describes a vital measuring principle for analysing integrated circuits with a nano-electro-mechanical system
- Includes supplementary material: sn.pub/extras
Part of the book series: Microtechnology and MEMS (MEMS)
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Table of contents (6 chapters)
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Front Matter
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Back Matter
About this book
Authors and Affiliations
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Dept. of Electrical Engineering, Center for Integrated Systems, Stanford University, Stanford, USA
D. Lange
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Physical Electronics Laboratory, ETH Zürich, Zürich, Switzerland
O. Brand, H. Baltes
Bibliographic Information
Book Title: CMOS Cantilever Sensor Systems
Book Subtitle: Atomic Force Microscopy and Gas Sensing Applications
Authors: D. Lange, O. Brand, H. Baltes
Series Title: Microtechnology and MEMS
DOI: https://doi.org/10.1007/978-3-662-05060-6
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 2002
Hardcover ISBN: 978-3-540-43143-5Published: 23 July 2002
Softcover ISBN: 978-3-642-07728-9Published: 04 December 2010
eBook ISBN: 978-3-662-05060-6Published: 17 April 2013
Series ISSN: 1615-8326
Series E-ISSN: 2365-0680
Edition Number: 1
Number of Pages: VIII, 142
Topics: Nanotechnology, Nanotechnology and Microengineering, Applied and Technical Physics, Control, Robotics, Mechatronics, Engineering, general, Measurement Science and Instrumentation