Overview
Part of the book series: Research Reports Esprit (ESPRIT, volume 1)
Part of the book sub series: Project 369 (2263)
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Keywords
- Dielectrics
- Dielektrizität
- Dünnschichttechnik
- Integrated Circuits (IC)
- Integrierte Schaltung
- Metal-Nitride-Oxide-Silion (MNOS)
- Metall-Nitrid-Oxid-Silizium-Strukturen (MNOS)
- Silicon Nitride and Oxynitride Thin Films
- Siliziumnitrid- und Oxynitrid-Dünnschichten
- Structures
About this book
Bibliographic Information
Book Title: LPCVD Silicon Nitride and Oxynitride Films
Book Subtitle: Material and Applications in Integrated Circuit Technology
Editors: F.H.P.M. Habraken
Series Title: Research Reports Esprit
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: ECSC — EEC — EAEC, Brussels — Luxembourg 1991
Softcover ISBN: 978-3-540-53954-4Published: 28 May 1991
Edition Number: 1
Number of Pages: X, 159
Number of Illustrations: 1 b/w illustrations