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Ion Beam Modification of Solids

Ion-Solid Interaction and Radiation Damage

  • Book
  • © 2016

Overview

  • Explains models for description of damage evolution by both nuclear and electronic energy loss
  • Presents the state of the art of knowledge of damage formation in insulators and semiconductors due to nuclear and electronic excitation
  • Describes the applications of ion beam methods
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Series in Surface Sciences (SSSUR, volume 61)

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Table of contents (13 chapters)

  1. Physical Basics

  2. Damage Formation and Amorphization by Nuclear Energy Deposition

  3. Damage Formation and Amorphisation by High Electronic Energy Deposition

  4. Selected Applications of Ion Irradiation

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About this book

This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the physical basics of ion-solid interaction and on ion-beam induced structural modifications of solids. Ion beams are widely used to modify the physical properties of materials. A complete theory of ion stopping in matter and the calculation of the energy loss due to nuclear and electronic interactions are presented including the effect of ion channeling. To explain structural modifications due to high electronic excitations, different concepts are presented with special emphasis on the thermal spike model. Furthermore, general concepts of damage evolution as a function of ion mass, ion fluence, ion flux and temperature are described in detail and their limits and applicability are discussed. The effect of nuclear and electronic energy loss on structural modifications of solids such as damage formation, phase transitions and amorphization is reviewed for insulators and semiconductors. Finally some selected applications of ion beams are given.

Editors and Affiliations

  • Institute of Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany

    Werner Wesch

  • Institute of Solid State Physics, Friedrich-Schiller-University, Jena, Germany

    Elke Wendler

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