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Piezoelectric MEMS Resonators

  • Book
  • © 2017

Overview

Editors:
  1. Harmeet Bhugra

    1. MEMS Division, Engineering Director, IDT Inc., San Jose, USA

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    You can also search for this editor in PubMed   Google Scholar

  2. Gianluca Piazza

    1. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, USA

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

  • Reviews exhaustively the key recent developments in piezoelectric MEMS resonator design and optimization, manufacturing and reliability, and materials for piezoelectric resonators
  • Provides many examples of real world implementations of piezo-MEMS resonators, including an overview of existing commercial opportunities for piezoelectric MEMS resonators
  • Maximizes reader insights into the advantages of MEMS technologies and challenges that have to be overcome in order to meet market needs
  • Broadens readers’ understanding of piezoelectric MEMS resonator design, with a focus on specific parameter optimization such as Q, electromechanical coupling, and temperature compensation
  • Includes supplementary material: sn.pub/extras

Part of the book series: Microsystems and Nanosystems (MICRONANO)

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Table of contents (16 chapters)

  1. Front Matter

    Pages i-xii
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  2. Materials for Piezoelectric MEMS Resonators

    1. Front Matter

      Pages 1-1
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    2. AlN Thin Film Processing and Basic Properties

      • Paul Muralt
      Pages 3-37

    3. Lead Zirconate Titanate (PZT) for M/NEMS

      • Ronald G. Polcawich, Jeffrey S. Pulskamp
      Pages 39-71

    4. Gallium Nitride for M/NEMS

      • Mina Rais-Zadeh, Dana Weinstein
      Pages 73-98

    5. Lithium Niobate for M/NEMS Resonators

      • Songbin Gong
      Pages 99-129

  3. Design of Piezoelectric MEMS Resonators

    1. Front Matter

      Pages 131-131
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    2. Quality Factor and Coupling in Piezoelectric MEMS Resonators

      • Reza Abdolvand, Hedy Fatemi, Sina Moradian
      Pages 133-152

    3. Flexural Piezoelectric Resonators

      • David Horsley, Yipeng Lu, Ofer Rozen
      Pages 153-173

    4. Laterally Vibrating Piezoelectric MEMS Resonators

      • Matteo Rinaldi
      Pages 175-202

    5. BAW Piezoelectric Resonators

      • Ken-ya Hashimoto
      Pages 203-220

    6. Shear Piezoelectric MEMS Resonators

      • D. T. Chang, D. J. Kirby
      Pages 221-242

    7. Temperature Compensation of Piezo-MEMS Resonators

      • Wanling Pan
      Pages 243-256

    8. Computational Modeling Challenges

      • Mattan Kamon
      Pages 257-279

  4. Manufacturing and Reliability of Piezoelectric MEMS Resonators

    1. Front Matter

      Pages 281-281
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    2. Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators

      • Roozbeh Tabrizian
      Pages 283-298

    3. Reliability and Quality Assessment (Stability and Packages)

      • Robert Gubser
      Pages 299-310

    4. Large Volume Testing and Calibration

      • Minfan Pai
      Pages 311-331

  5. Real World Implementations

    1. Front Matter

      Pages 333-333
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    2. High Frequency Oscillators for Mobile Devices

      • Jan H. Kuypers
      Pages 335-385
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Keywords

About this book

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:
  • Widely-used piezoelectric materials, as well as materials in which there is emerging interest
  • Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
  • Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
  • Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
  • ...and more!
The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.



Editors and Affiliations

  • MEMS Division, Engineering Director, IDT Inc., San Jose, USA

    Harmeet Bhugra

  • Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, USA

    Gianluca Piazza

About the editors

Harmeet "Mitu" Bhugra lead the development of the world's first PiezoElectric MEMS timing and sensor products at IDT. He holds 22 US patents and has published multiple technical papers and given multiple talks on MEMS technology.

Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.

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