Overview
- Covers microsystem fabrication, MEMS device design, circuit design, circuit micro-architecture and CAD
- Describes work previously done in the field and also lays the groundwork and criteria for future energy-efficient device and system design
- Maximizes reader insights into the design and modeling of micro-relay, micro-relay reliability, integrated circuit design with micro-relays, and more
Part of the book series: Microsystems and Nanosystems (MICRONANO)
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Table of contents (7 chapters)
Keywords
About this book
Authors and Affiliations
About the authors
Fred Chen currently works at Lion Semiconductor, Inc. Hei Kam currently works at Intel Corporation and was formerly a graduate student at UC Berkeley.  Â
Bibliographic Information
Book Title: Micro-Relay Technology for Energy-Efficient Integrated Circuits
Authors: Hei Kam, Fred Chen
Series Title: Microsystems and Nanosystems
DOI: https://doi.org/10.1007/978-1-4939-2128-7
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer Science+Business Media New York 2015
Hardcover ISBN: 978-1-4939-2127-0Published: 20 October 2014
Softcover ISBN: 978-1-4939-5417-9Published: 23 August 2016
eBook ISBN: 978-1-4939-2128-7Published: 16 October 2014
Series ISSN: 2198-0063
Series E-ISSN: 2198-0071
Edition Number: 1
Number of Pages: X, 183
Number of Illustrations: 111 b/w illustrations, 56 illustrations in colour
Topics: Nanotechnology and Microengineering, Circuits and Systems, Energy Efficiency