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Table of contents (12 chapters)
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Background to Electron Beam Testing Technology
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Part I
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Part III
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: Electron Beam Testing Technology
Editors: John T. L. Thong
Series Title: Microdevices
DOI: https://doi.org/10.1007/978-1-4899-1522-1
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1993
Hardcover ISBN: 978-0-306-44360-2Published: 31 July 1993
Softcover ISBN: 978-1-4899-1524-5Published: 04 June 2013
eBook ISBN: 978-1-4899-1522-1Published: 29 June 2013
Edition Number: 1
Number of Pages: XVI, 462
Topics: Solid State Physics, Spectroscopy and Microscopy, Condensed Matter Physics, Crystallography and Scattering Methods, Electrical Engineering, Optical and Electronic Materials