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Table of contents (7 chapters)
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Front Matter
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Back Matter
About this book
Editors and Affiliations
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SRI International, Menlo Park, USA
Ivor Brodie, Julius J. Muray
Bibliographic Information
Book Title: The Physics of Micro/Nano-Fabrication
Editors: Ivor Brodie, Julius J. Muray
Series Title: Microdevices
DOI: https://doi.org/10.1007/978-1-4757-6775-9
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1992
Hardcover ISBN: 978-0-306-44146-2Published: 31 January 1993
Softcover ISBN: 978-1-4419-3221-1Published: 06 December 2010
eBook ISBN: 978-1-4757-6775-9Published: 29 June 2013
Edition Number: 1
Number of Pages: XX, 622
Topics: Solid State Physics, Spectroscopy and Microscopy, Condensed Matter Physics, Crystallography and Scattering Methods, Electrical Engineering, Optical and Electronic Materials