Editors:
- First book to connect missing link between semiconductor device engineers/designers and process engineers, material designers, and chemists
- First book solely dedicated to the application of ALD to the semiconductor/microelectronics fields
- Written by top experts in the field
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Table of contents (10 chapters)
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Front Matter
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Introduction
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Front Matter
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Fundamentals
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Front Matter
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ALD for Memory Devices
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Front Matter
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ALD for Logic Devices
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Front Matter
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ALD Machines
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Front Matter
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Back Matter
About this book
Editors and Affiliations
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Department of Materials Science and Engi, Seoul National University, Seoul, Korea, Republic of (South Korea)
Choel Seong Hwang
About the editor
 Cheol Seong Hwang received M.S. and Ph.D. degrees from Seoul National University, Seoul, Korea, in 1989 and 1993, respectively. In 1993, he joined the Material Science and Engineering Laboratory at the National Institutes of Standards and Technology, Gaithersburg, MD, as a Postdoctoral Research Fellow. He then joined Samsung Electronics Company, Ltd., as a Senior Researcher in 1994. In 1998, Dr. Hwang became a professor in the department of material science and engineering at Seoul National University. He has authored or coauthored more than 380 papers in international peer-reviewed scientific journals, which have been cited more than 7,500 times.Dr. Hwang was a recipient of the Alexander von Humboldt Fellowship Award, the 7th Presidential Young Scientist Award of the Korean government, and Faculty Excellent Award of Air Products, USA.
Bibliographic Information
Book Title: Atomic Layer Deposition for Semiconductors
Editors: Choel Seong Hwang
DOI: https://doi.org/10.1007/978-1-4614-8054-9
Publisher: Springer New York, NY
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer Science+Business Media New York 2014
Hardcover ISBN: 978-1-4614-8053-2Published: 19 October 2013
Softcover ISBN: 978-1-4899-7943-8Published: 23 August 2016
eBook ISBN: 978-1-4614-8054-9Published: 18 October 2013
Edition Number: 1
Number of Pages: X, 263
Number of Illustrations: 89 b/w illustrations, 81 illustrations in colour
Topics: Electrochemistry, Semiconductors, Memory Structures, Energy Systems, Electronics and Microelectronics, Instrumentation