Overview
- Focuses on the mechanical domain (specifically, the quasi-static sub-domain), which is at the core of most of the MEMS
- Provides a more in-depth look at the main problems that involve reliable modeling, analysis, and design
- Request lecturer material: sn.pub/lecturer-material
Part of the book series: Microsystems (MICT, volume 17)
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Table of contents (4 chapters)
Keywords
About this book
Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
- An in-depth treatment of problems that involve reliable modeling, analysis and design,
- Analytical models with correct dependences on service dimensions,
- Cantilever based systems for nanofabrication researchers and designers, and
- Dynamics of complex spring and beam microsystems.
This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor's solution manual is available on the book's webpage at springer.com.
Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.
Authors and Affiliations
Bibliographic Information
Book Title: Dynamics of Microelectromechanical Systems
Authors: Nicolae Lobontiu
Series Title: Microsystems
DOI: https://doi.org/10.1007/978-0-387-68195-5
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag US 2007
Hardcover ISBN: 978-0-387-36800-9Published: 03 October 2007
Softcover ISBN: 978-1-4419-4225-8Published: 23 November 2010
eBook ISBN: 978-0-387-68195-5Published: 08 July 2014
Series ISSN: 1389-2134
Edition Number: 1
Number of Pages: X, 403
Topics: Mechanical Engineering, Electronics and Microelectronics, Instrumentation, Nanotechnology, Circuits and Systems, Computer-Aided Engineering (CAD, CAE) and Design