Editors:
- Comprehensively shows the interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
- Covers BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
- Includes hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
- Provides complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
Part of the book series: MEMS Reference Shelf (MEMSRS)
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Table of contents (11 chapters)
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Front Matter
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Back Matter
About this book
BioNanoFluidic MEMS explains biosensor development fundamentals and initiates an awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, home land security, environmental needs, and disease identification. In addition, the material covered in this book introduces and lays the basic foundation for design, fabrication, testing, and implemention of next generation biosensors through hands-on learning.
Editors and Affiliations
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George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta
Peter J. Hesketh
Bibliographic Information
Book Title: BioNanoFluidic MEMS
Editors: Peter J. Hesketh
Series Title: MEMS Reference Shelf
DOI: https://doi.org/10.1007/978-0-387-46283-7
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag US 2008
Hardcover ISBN: 978-0-387-46281-3Published: 14 December 2007
Softcover ISBN: 978-1-4419-4279-1Published: 23 November 2010
eBook ISBN: 978-0-387-46283-7Published: 15 November 2007
Series ISSN: 1936-4407
Series E-ISSN: 1936-4415
Edition Number: 1
Number of Pages: X, 295
Number of Illustrations: 100 b/w illustrations
Topics: Nanotechnology, Circuits and Systems, Biomedical Engineering and Bioengineering, Engineering Fluid Dynamics, Biological and Medical Physics, Biophysics, Biomaterials