Authors:
- One of the first texts written that is accessible to undergraduate technical majors regardless of specific discipline
- Describes sensors, actuators, and microfluidics, and their relationship with MEMS
- Includes laboratory exercises designed to facilitate student learning about the basic microfabrication processes
- Provides review questions and problems at the end of each chapter to summarize learning objectives
- Includes supplementary material: sn.pub/extras
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Table of contents (13 chapters)
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Front Matter
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Microfabrication laboratories
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Front Matter
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Laboratories
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Back Matter
About this book
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.
Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
Authors and Affiliations
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Dept. Mechanical Engineering, Rose-Hulman Institute of Technology, Terre Haute, U.S.A.
Thomas M. Adams, Richard A. Layton
Bibliographic Information
Book Title: Introductory MEMS
Book Subtitle: Fabrication and Applications
Authors: Thomas M. Adams, Richard A. Layton
DOI: https://doi.org/10.1007/978-0-387-09511-0
Publisher: Springer New York, NY
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer-Verlag US 2010
Hardcover ISBN: 978-0-387-09510-3Published: 21 December 2009
Softcover ISBN: 978-1-4899-8421-0Published: 07 September 2014
eBook ISBN: 978-0-387-09511-0Published: 08 December 2009
Edition Number: 1
Number of Pages: XV, 440
Topics: Electronics and Microelectronics, Instrumentation, Circuits and Systems, Classical Mechanics, Surfaces and Interfaces, Thin Films, Solid Mechanics