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The Physics of Micro/Nano-Fabrication

  • Book
  • © 1992

Overview

Part of the book series: Microdevices (MDPF)

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Table of contents (7 chapters)

Keywords

About this book

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Editors and Affiliations

  • SRI International, Menlo Park, USA

    Ivor Brodie, Julius J. Muray

Bibliographic Information

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