Overview
- Compares nanofabrication technologies, including their capabilities and limitations, in a consistent, reader-friendly manner
- Contains in-depth discussions on optical lithography and electron beam lithography, based on the author’s experience having developed simulation programs for each
- Presents practical information and examples, drawn from both primary research and industrial applications, which readers can use in realistic situations and for trouble-shooting
Access this book
Tax calculation will be finalised at checkout
Other ways to access
About this book
Similar content being viewed by others
Keywords
Table of contents (11 chapters)
Authors and Affiliations
About the author
Bibliographic Information
Book Title: Nanofabrication
Book Subtitle: Principles, Capabilities and Limits
Authors: Zheng Cui
DOI: https://doi.org/10.1007/978-3-319-39361-2
Publisher: Springer Cham
eBook Packages: Engineering, Engineering (R0)
Copyright Information: Springer International Publishing Switzerland 2017
Hardcover ISBN: 978-3-319-39359-9Published: 12 September 2016
Softcover ISBN: 978-3-319-81875-7Published: 20 June 2018
eBook ISBN: 978-3-319-39361-2Published: 10 August 2016
Edition Number: 2
Number of Pages: XVII, 432
Number of Illustrations: 266 b/w illustrations, 50 illustrations in colour
Topics: Nanotechnology and Microengineering, Solid Mechanics, Circuits and Systems, Classical Electrodynamics