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Introduces and explains a formal Six Sigma design methodology that is currently absent from MEMS literature
Discusses methodologies that keep process, package, test and characterization, product, and market in mind
Shows how to design for reliability at both system and component level
Includes case studies and example design problems addressed using Six Sigma techniques
One of the biggest challenges facing engineers involved in MEMs research, development and manufacturing is identifying a structured MEMs design methodology. Existing MEMS design literature has placed a significant emphasis on the modeling aspect of design. There is a need for a body of literature that describes a design "methodology" for MEMS. This book builds on the extensive body of literature that already exists on analytical and numerical multi-Physics "modeling" and provides a structured approach to microsystem design. "Micro Electro Mechanical Systems (MEMs): A Design Approach" focuses on the development of a standard methodology for MEMs using Six Sigma techniques. This book will be of interest to engineering professionals, academics and researchers involved in the manufacturing, development and design of Micro-Electro-Mechanical Systems (MEMS).
Preface - The need for structured MEMS design - Defining the problem - Design for test and characterization - Conceptual design - Design for Process - Design for Packaging - Design for Reliability - Design optimization - Conclusion and take-away - Index.