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Engineering - Mechanical Engineering | Micro Electro Mechanical Systems - A Design Approach

Micro Electro Mechanical Systems

A Design Approach

Subramanian, Kanakasabapathi

2010, Approx. 400 p.


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ISBN 978-0-387-49844-7

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  • About this book

  • Introduces and explains a formal Six Sigma design methodology that is currently absent from MEMS literature
  • Discusses methodologies that keep process, package, test and characterization, product, and market in mind
  • Shows how to design for reliability at both system and component level
  • Includes case studies and example design problems addressed using Six Sigma techniques

One of the biggest challenges facing engineers involved in MEMs research, development and manufacturing is identifying a structured MEMs design methodology. Existing MEMS design literature has placed a significant emphasis on the modeling aspect of design. There is a need for a body of literature that describes a design "methodology" for MEMS. This book builds on the extensive body of literature that already exists on analytical and numerical multi-Physics "modeling" and provides a structured approach to microsystem design. "Micro Electro Mechanical Systems (MEMs): A Design Approach" focuses on the development of a standard methodology for MEMs using Six Sigma techniques. This book will be of interest to engineering professionals, academics and researchers involved in the manufacturing, development and design of Micro-Electro-Mechanical Systems (MEMS).

Content Level » Professional/practitioner

Keywords » Standard - Subramanian - Systems - approach - conceptual design - design - development - electro - mechanical - micro - microelectromechanical system (MEMS) - modeling - physics - reliability

Related subjects » Circuits & Systems - Electronics & Electrical Engineering - Mechanical Engineering - Nanotechnology

Table of contents 

Preface - The need for structured MEMS design - Defining the problem - Design for test and characterization - Conceptual design - Design for Process - Design for Packaging - Design for Reliability - Design optimization - Conclusion and take-away - Index.

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