Overview
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Table of contents (23 chapters)
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Getting Started
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Circuit and System Issues
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: Microsystem Design
Authors: Stephen D. Senturia
DOI: https://doi.org/10.1007/b117574
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 2001
Hardcover ISBN: 978-0-7923-7246-2Published: 30 November 2000
Softcover ISBN: 978-1-4757-7458-0Published: 26 April 2013
eBook ISBN: 978-0-306-47601-3Published: 20 December 2005
Edition Number: 1
Number of Pages: XXVI, 689
Topics: Electrical Engineering, Optical and Electronic Materials, Classical Mechanics